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ParcanNano百及納米工業(yè)型原子力顯微系統(tǒng)

  基于全球獨(dú)家專利的、源自德國(guó)的主動(dòng)式探針技術(shù)，百及納米科技開發(fā)了下一代工業(yè)智能型原子力顯微鏡系統(tǒng)，針對(duì)工業(yè)領(lǐng)域應(yīng)用提供快速、智能的樣品形貌表征，適用于工業(yè)型檢錯(cuò)、質(zhì)量評(píng)定和量化測(cè)量等，尤其適用于檢測(cè)大尺寸晶圓或光學(xué)晶圓。  

系統(tǒng)可集成大尺寸樣品位移臺(tái)、全自動(dòng)光學(xué)導(dǎo)航系統(tǒng)和配套自動(dòng)控制軟件，可對(duì)大尺寸樣品 進(jìn)行全方位的光學(xué)成像定位，根據(jù)光學(xué)成像結(jié)果自動(dòng)標(biāo)定多個(gè)精確測(cè)量區(qū)域，并根據(jù)缺陷/待測(cè)結(jié)構(gòu)的特點(diǎn)進(jìn)行模式識(shí)別，智能選取原子力顯微鏡測(cè)量參數(shù)，在樣品多個(gè)位置間自動(dòng)移動(dòng)，進(jìn)行可 重復(fù)的高分辨率測(cè)量，生成檢測(cè)書面報(bào)告，整個(gè)過(guò)程無(wú)需人工參與，最終實(shí)現(xiàn)對(duì)大尺寸樣品形貌 的智能化、自動(dòng)化的高速、高效、高質(zhì)量納米級(jí)測(cè)量。    

掃描結(jié)果示例：

掃描速率：6 mm/s

掃描范圍：510mm x 135mm

單次成像面積： 505 mm ×130 mm

結(jié)構(gòu)高度: 60 nm

ParcanNano 100 nano industrial atomic force microscopy system

Based on the global patent home alone, from Germany active probe technology, best and nano science and technology to develop the next generation industrial system, intelligent atomic force microscope for industrial application provides a quick and intelligent the CLSM characterization, suitable for industrial inspection, quality evaluation and quantitative measurement of fault, especially suitable for detection of large size wafer or optical wafers.

System can be integrated displacement of large size sample machine, automatic optical navigation system and form a complete set of automatic control software, can be a full range of optical imaging of large size samples, according to the results of the optical imaging automatic calibration more accurate measurement area, and according to the characteristics of the defect/structures under test for pattern recognition, intelligent selection of atomic force microscope measurement parameters, It automatically moves between multiple locations of samples, carries out repeatable high-resolution measurements, and generates written test reports. The whole process requires no manual participation, and finally realizes intelligent, automated, high-speed, efficient and high-quality nanoscale measurement of large-size sample morphology.