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 OAI的面板級掩模光刻機(jī) Model 6020S, 

用于FOPLP型號6020S -半自動化或自動化,實(shí)現(xiàn)500mm x 500mm晶圓尺寸的FO-PLP加工.

 

OAI’s Panel Level Mask Aligner for FOPLP Model 6020S - Semi or Automated

Enabling FO-PLP Processing at 500mm x 500mm Wafer Sizes

 

OAI掩模對準(zhǔn)器，不同的印刷方式

距離: 間隙可設(shè)置在一個非常寬的范圍內(nèi)，增量精度1µM

軟接觸: •基材被帶入非常柔軟的機(jī)械接觸曝光時的掩模。通過接觸力可調(diào)軟件設(shè)置

金屬觸點(diǎn): •接觸額外的氮?dú)鈮毫?/span>

真空接觸: •真空級別控制接觸力。真空度為由用戶設(shè)置


OAI Mask Aligners
Various Printing Modes

PROXIMITY: 
• THE GAP IS SETTABLE OVER A VERY WIDE RANGE WITH AN  INCREMENTAL PRECISION OF 1µM 

SOFT CONTACT: 
• SUBSTRATE IS BROUGHT INTO VERY SOFT MECHANICAL CONTACT WITH THE MASK DURING EXPOSURE. THE CONTACT FORCE IS ADJUSTABLE VIA  SOFTWARE SETTINGS

HARD CONTACT:
• CONTACT WITH ADDITIONAL N2 pressure VACUUM CONTACT: 
• VACUUM LEVEL CONTROLS THE CONTACT FORCE. LEVEL OF VACUUM IS SET BY USER